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Photonics & Laser

Photomask Technology + Extreme Ultraviolet Lithography 2021

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Exhibition Date:  Sep.28-29 2021

Conference Date: Sep. 27-30, 2021

Venue:Monterey Conference Center and Monterey Marriott, Monterey CA, United States

Organizer:International Society For Optical Engineering  (SPIE)

Frequency: Annually   


Description of the event

Present your research at the semiconductor mask industry's largest and most important annual event.

This is the key technical meeting for mask makers, emerging mask technologies, and EUV lithography addressing a number of critical topics, including current technical issues, emerging technologies, EUVL technology and infrastructure readiness, and future trends.


Featured Technology:

These technologies help make computers, smartphones, flat screen TVs and solar panels more affordable and accessible to consumers and businesses around the world.

 • Mask technologies: Inspection/repair, Metrology, Cleaning

 • Mask business

 • EUV

 • Nanoimprint

 • Direct write

 • Patterning

 • Wafers

 • Tools

 • Simulation

 • Resists and substrates

 • Materials and etching



 • Engineers and designers

 • Corporate managers

 • Application and product developers

 • Mask and chip designers

 • Resist chemists

 • Experts in mask infrastructure and mask integration

 • Standards developers            


2020 Exhibitors:

attocube systems Inc.

CyberOptics Corp.

Energetiq Technology, Inc.

Gudeng Precision Industrial Co., Ltd.

Heidelberg Instruments Inc.

MSP Corp.

Pozzetta, Inc.

Rigaku Innovative Technologies, Inc.

Semiconductor Digest

Shin-Etsu MicroSi, Inc.



The premier event for companies focused on photomasks and EUV lithography

Come learn about the research that can influence your next product

"This conference is critical for getting the core people together to have discussions. The exchange of technology really helps us to innovate new technologies and that’s what we need with all these emerging markets."

— Petrie Yam, KLA-Tencor


Contact:  Mr. Nick Ni 

Tel: 021-36050835      Fax: 021-36050835

Mobile: 13901684989


Address: Room 601& 611, Carnival Building, No. 210, Dahua Road, Baoshan District, Shanghai

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